diff --git a/units/systemd-tmpfiles-clean.service.in b/units/systemd-tmpfiles-clean.service.in
index 9e2f04bfefd..5d70aafb29f 100644
--- a/units/systemd-tmpfiles-clean.service.in
+++ b/units/systemd-tmpfiles-clean.service.in
@@ -18,5 +18,5 @@ Before=shutdown.target
 [Service]
 Type=oneshot
 ExecStart=@rootbindir@/systemd-tmpfiles --clean
-SuccessExitStatus=65
+SuccessExitStatus=DATAERR
 IOSchedulingClass=idle
diff --git a/units/systemd-tmpfiles-setup-dev.service.in b/units/systemd-tmpfiles-setup-dev.service.in
index 50df15c291c..ed52db4953a 100644
--- a/units/systemd-tmpfiles-setup-dev.service.in
+++ b/units/systemd-tmpfiles-setup-dev.service.in
@@ -19,4 +19,4 @@ Before=sysinit.target local-fs-pre.target systemd-udevd.service shutdown.target
 Type=oneshot
 RemainAfterExit=yes
 ExecStart=@rootbindir@/systemd-tmpfiles --prefix=/dev --create --boot
-SuccessExitStatus=65 73
+SuccessExitStatus=DATAERR CANTCREAT
diff --git a/units/systemd-tmpfiles-setup.service.in b/units/systemd-tmpfiles-setup.service.in
index b02bbcd61b7..32a475d7153 100644
--- a/units/systemd-tmpfiles-setup.service.in
+++ b/units/systemd-tmpfiles-setup.service.in
@@ -20,4 +20,4 @@ RefuseManualStop=yes
 Type=oneshot
 RemainAfterExit=yes
 ExecStart=@rootbindir@/systemd-tmpfiles --create --remove --boot --exclude-prefix=/dev
-SuccessExitStatus=65 73
+SuccessExitStatus=DATAERR CANTCREAT
diff --git a/units/user/systemd-tmpfiles-clean.service.in b/units/user/systemd-tmpfiles-clean.service.in
index 9cd19720d3e..306b064e895 100644
--- a/units/user/systemd-tmpfiles-clean.service.in
+++ b/units/user/systemd-tmpfiles-clean.service.in
@@ -17,5 +17,5 @@ Before=basic.target shutdown.target
 [Service]
 Type=oneshot
 ExecStart=@rootbindir@/systemd-tmpfiles --user --clean
-SuccessExitStatus=65
+SuccessExitStatus=DATAERR
 IOSchedulingClass=idle
diff --git a/units/user/systemd-tmpfiles-setup.service.in b/units/user/systemd-tmpfiles-setup.service.in
index 6467dab8969..a852ef57480 100644
--- a/units/user/systemd-tmpfiles-setup.service.in
+++ b/units/user/systemd-tmpfiles-setup.service.in
@@ -19,7 +19,7 @@ RefuseManualStop=yes
 Type=oneshot
 RemainAfterExit=yes
 ExecStart=@rootbindir@/systemd-tmpfiles --user --create --remove --boot
-SuccessExitStatus=65
+SuccessExitStatus=DATAERR
 
 [Install]
 WantedBy=basic.target